Paper Title:
Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
655-658
DOI
10.4028/www.scientific.net/MSF.338-342.655
Citation
D. Sands, P.H. Key, M. Schlaf, C.D. Walton, C.J. Anthony, M. J. Uren, "Optical Characterization of Lattice Damage and Recovery in Ion-Implanted and Pulsed Excimer Laser Irradiated 4H-SiC", Materials Science Forum, Vols. 338-342, pp. 655-658, 2000
Online since
May 2000
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