Paper Title:
Application and Improvement of the Spreading Resistance Method for p-Type 6H-SiC
| Periodical |
Materials Science Forum (Volumes 338 - 342)
|
| Main Theme |
Silicon Carbide and Related Materials - 1999
|
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
741-744 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.741 |
| Citation |
T. Gebel et al., 2000, Materials Science Forum, 338-342, 741 |
| Authors |
T. Gebel, D. Panknin, R. Riehn, S. Parascandola, Wolfgang Skorupa |
| Keywords |
Contact Barrier, Ion Sputtering, Metal-Semiconductor Contact, Spreading Resistance, Surface States |
| Price |
US$ 28,- |