Paper Title:

Application and Improvement of the Spreading Resistance Method for p-Type 6H-SiC

Periodical Materials Science Forum (Volumes 338 - 342)
Main Theme Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 741-744
DOI 10.4028/www.scientific.net/MSF.338-342.741
Citation T. Gebel et al., 2000, Materials Science Forum, 338-342, 741
Authors T. Gebel, D. Panknin, R. Riehn, S. Parascandola, Wolfgang Skorupa
Keywords Contact Barrier, Ion Sputtering, Metal-Semiconductor Contact, Spreading Resistance, Surface States
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