Paper Title:
Physics of SiC Processing
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
831-836
DOI
10.4028/www.scientific.net/MSF.338-342.831
Citation
G. Pensl, V. V. Afanas'ev, M. Bassler, T. Frank, M. Laube, M. Weidner, "Physics of SiC Processing", Materials Science Forum, Vols. 338-342, pp. 831-836, 2000
Online since
May 2000
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Price
$32.00
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