Paper Title:
Polishing and Surface Characterization of SiC Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
837-840
DOI
10.4028/www.scientific.net/MSF.338-342.837
Citation
W.J. Everson, D. Snyder, V.D. Heydemann, "Polishing and Surface Characterization of SiC Substrates", Materials Science Forum, Vols. 338-342, pp. 837-840, 2000
Online since
May 2000
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Price
$32.00
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