Paper Title:
Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
841-844
DOI
10.4028/www.scientific.net/MSF.338-342.841
Citation
W.C. Mitchel, J. Brown, D. Buckanan, R. Bertke, K. Malalingham, F. Orazio, P. Pirouz, H.-J. R. Tseng, U. B. Ramabadran, B. Roughani, "Comparison of Mechanical and Chemomechanical Polished SiC Wafers Using Photon Backscattering", Materials Science Forum, Vols. 338-342, pp. 841-844, 2000
Online since
May 2000
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Price
$32.00
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