Paper Title:
Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
845-848
DOI
10.4028/www.scientific.net/MSF.338-342.845
Citation
T.C. Chandler, Jr., M.B. Lari, T. S. Sudarshan, "Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers", Materials Science Forum, Vols. 338-342, pp. 845-848, 2000
Online since
May 2000
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Price
$32.00
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