Paper Title:
Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
865-868
DOI
10.4028/www.scientific.net/MSF.338-342.865
Citation
J. Senzaki, K. Fukuda, S. Imai, Y. Tanaka, N. Kobayashi, H. Tanoue, H. Okushi, K. Arai, "Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature", Materials Science Forum, Vols. 338-342, pp. 865-868, 2000
Online since
May 2000
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