Paper Title:
Damage Evolution in Al-implanted 4H SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
869-872
DOI
10.4028/www.scientific.net/MSF.338-342.869
Citation
A. Hallén, P.O.Å. Persson, A. Y. Kuznetsov, L. Hultman, B. G. Svensson, "Damage Evolution in Al-implanted 4H SiC", Materials Science Forum, Vols. 338-342, pp. 869-872, 2000
Online since
May 2000
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Price
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