Paper Title:
Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
87-90
DOI
10.4028/www.scientific.net/MSF.338-342.87
Citation
D. Schulz, K. Irmscher, J. Dolle, W. Eiserbeck, T. Müller, H. J. Rost, D. Siche, G. Wagner, J. Wollweber, "Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT", Materials Science Forum, Vols. 338-342, pp. 87-90, 2000
Online since
May 2000
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Price
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