Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT |
| Journal |
Materials Science Forum (Volumes 338 - 342) |
| Volume |
Silicon Carbide and Related Materials - 1999 |
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
87-90 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.87 |
| Citation |
D. Schulz et al., 2000, Materials Science Forum, 338-342, 87 |
| Authors |
D. Schulz, K. Irmscher, J. Dolle, W. Eiserbeck, Timo Müller, H. J. Rost, D. Siche, Günter Wagner, Jürgen Wollweber |
| Keywords |
6H Polytype, Nitrogen Concentration, Seed Orientation, Sublimation Bulk Growth |
| Full Paper |
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