Paper Title:
Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
| Periodical |
Materials Science Forum (Volumes 338 - 342)
|
| Main Theme |
Silicon Carbide and Related Materials - 1999
|
| Edited by |
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer |
| Pages |
873-876 |
| DOI |
10.4028/www.scientific.net/MSF.338-342.873 |
| Citation |
Y. Hishida et al., 2000, Materials Science Forum, 338-342, 873 |
| Authors |
Y. Hishida, Masanori Watanabe, Koichi Nakashima, Osamu Eryu |
| Keywords |
Electrical Conductivity, Excimer Laser, Ion Implantation, Laser Annealing, Photoluminescence (PL), Rutherford Backscattering |
| Price |
US$ 28,- |