Paper Title:
Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
873-876
DOI
10.4028/www.scientific.net/MSF.338-342.873
Citation
Y. Hishida, M. Watanabe, K. Nakashima, O. Eryu, "Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide", Materials Science Forum, Vols. 338-342, pp. 873-876, 2000
Online since
May 2000
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.