Paper Title:

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Periodical Materials Science Forum (Volumes 338 - 342)
Main Theme Silicon Carbide and Related Materials - 1999
Edited by Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages 873-876
DOI 10.4028/www.scientific.net/MSF.338-342.873
Citation Y. Hishida et al., 2000, Materials Science Forum, 338-342, 873
Authors Y. Hishida, Masanori Watanabe, Koichi Nakashima, Osamu Eryu
Keywords Electrical Conductivity, Excimer Laser, Ion Implantation, Laser Annealing, Photoluminescence (PL), Rutherford Backscattering
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