Paper Title:
Al and Al/C High Dose Implantation in 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
885-888
DOI
10.4028/www.scientific.net/MSF.338-342.885
Citation
J. M. Bluet, J. Pernot, T. Billon, S. Contreras, J.F. Michaud, J.-L. Robert, J. Camassel, "Al and Al/C High Dose Implantation in 4H-SiC", Materials Science Forum, Vols. 338-342, pp. 885-888, 2000
Online since
May 2000
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Price
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