Paper Title:
Channeled Implants in 6H Silicon Carbide
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
889-892
DOI
10.4028/www.scientific.net/MSF.338-342.889
Citation
M. S. Janson, A. Hallén, P. Godignon, A. Y. Kuznetsov, M. K. Linnarsson, E. Morvan, B. G. Svensson, "Channeled Implants in 6H Silicon Carbide", Materials Science Forum, Vols. 338-342, pp. 889-892, 2000
Online since
May 2000
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Price
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