Paper Title:
Damage Reduction in Channeled Ion Implanted 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
893-896
DOI
10.4028/www.scientific.net/MSF.338-342.893
Citation
E. Morvan, N. Mestres, F.J. Campos, J. Pascual, A. Hallén, M. K. Linnarsson, A. Y. Kuznetsov, "Damage Reduction in Channeled Ion Implanted 6H-SiC", Materials Science Forum, Vols. 338-342, pp. 893-896, 2000
Online since
May 2000
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Price
$32.00
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