Paper Title:
Electrical and Structural Properties of Al and B Implanted 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 338-342)
Edited by
Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer
Pages
909-912
DOI
10.4028/www.scientific.net/MSF.338-342.909
Citation
Y. Tanaka, N. Kobayashi, H. Okumura, R. Suzuki, T. Ohdaira, M. Hasegawa, M. Ogura, S. Yoshida, H. Tanoue, "Electrical and Structural Properties of Al and B Implanted 4H-SiC", Materials Science Forum, Vols. 338-342, pp. 909-912, 2000
Online since
May 2000
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.