Paper Title:
In Situ Measurement of Stress during Deposition of Boron Nitride Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 347-349)
Edited by
A.J. Böttger, R. Delhez and E.J. Mittemeijer
Pages
156-160
DOI
10.4028/www.scientific.net/MSF.347-349.156
Citation
W. Fukarek, C. Fitz, A. Kolitsch, W. Möller, "In Situ Measurement of Stress during Deposition of Boron Nitride Films", Materials Science Forum, Vols. 347-349, pp. 156-160, 2000
Online since
May 2000
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Price
$32.00
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