Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films |
|
| Journal | Materials Science Forum (Volume 352) |
|---|---|
| Volume | Trends in Advanced Materials and Processes |
| Edited by | D.P. Uskokovic, G.A. Battiston, J.M. Nedeljkovic, S.K. Milonjic and D.I. Rakovic |
| Pages | 29-34 |
| DOI | 10.4028/www.scientific.net/MSF.352.29 |
| Authors | M. Zlatanović, M. Gajić, U. Kašćak, I. Popović, V. Godjevac |
| Keywords | Bias Voltage-Current Characteristics, Magnetron Discharge Voltage-Current Characteristics, Unbalanced Magnetron |
| Full Paper | 
Get the full paper by clicking here
|