Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films |
| Journal |
Materials Science Forum (Volume 352) |
| Volume |
Trends in Advanced Materials and Processes |
| Edited by |
D.P. Uskokovic, G.A. Battiston, J.M. Nedeljkovic, S.K. Milonjic and D.I. Rakovic |
| Pages |
29-34 |
| DOI |
10.4028/www.scientific.net/MSF.352.29 |
| Citation |
M. Zlatanović et al., 2000, Materials Science Forum, 352, 29 |
| Authors |
M. Zlatanović, M. Gajić, U. Kašćak, I. Popović, V. Godjevac |
| Keywords |
Bias Voltage-Current Characteristics, Magnetron Discharge Voltage-Current Characteristics, Unbalanced Magnetron |
| Full Paper |
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