Paper Title:
Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films
  Abstract

  Info
Periodical
Edited by
D.P. Uskokovic, G.A. Battiston, J.M. Nedeljkovic, S.K. Milonjic and D.I. Rakovic
Pages
29-34
DOI
10.4028/www.scientific.net/MSF.352.29
Citation
M. Zlatanović, M. Gajić, U. Kašćak, I. Popović, V. Godjevac, "Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films", Materials Science Forum, Vol. 352, pp. 29-34, 2000
Online since
August 2000
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Price
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