Paper Title:
Modeling Analysis of SiC CVD in a Planetary Reactor
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
103-106
DOI
10.4028/www.scientific.net/MSF.353-356.103
Citation
A.N. Vorob'ev, A.K. Semennikov, A.I. Zhmakin, Y. N. Makarov, M. Dauelsberg, F. Wischmeyer, M. Heuken, H. Jürgensen, "Modeling Analysis of SiC CVD in a Planetary Reactor", Materials Science Forum, Vols. 353-356, pp. 103-106, 2001
Online since
January 2001
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Price
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