Paper Title:
Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
107-110
DOI
10.4028/www.scientific.net/MSF.353-356.107
Citation
A.N. Vorob'ev, M.V. Bogdanov, A.E. Komissarov, S.Y. Karpov, O.V. Bord, A.A. Lovtsus, Y. N. Makarov, "Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor", Materials Science Forum, Vols. 353-356, pp. 107-110, 2001
Online since
January 2001
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Price
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