Paper Title:
Control of Surface Morphologies for Epitaxial Growth on Low Off-Angle 4H-SiC (0001) Substrates
| Periodical |
Materials Science Forum (Volumes 353 - 356)
|
| Main Theme |
Silicon Carbide and Related Materials 2000
|
| Edited by |
G. Pensl, D. Stephani and M. Hundhausen |
| Pages |
135-138 |
| DOI |
10.4028/www.scientific.net/MSF.353-356.135 |
| Citation |
Koh Masahara et al., 2001, Materials Science Forum, 353-356, 135 |
| Authors |
Koh Masahara, Mitsuhiro Kushibe, H. Ohno, Kazutoshi Kojima, Tetsuo Takahashi, Yuuki Ishida, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai |
| Keywords |
Low Off-Angled Substrate, Pre-Growth Etching, Surface Morphology |
| Price |
US$ 28,- |