Paper Title:

Control of Surface Morphologies for Epitaxial Growth on Low Off-Angle 4H-SiC (0001) Substrates

Periodical Materials Science Forum (Volumes 353 - 356)
Main Theme Silicon Carbide and Related Materials 2000
Edited by G. Pensl, D. Stephani and M. Hundhausen
Pages 135-138
DOI 10.4028/www.scientific.net/MSF.353-356.135
Citation Koh Masahara et al., 2001, Materials Science Forum, 353-356, 135
Authors Koh Masahara, Mitsuhiro Kushibe, H. Ohno, Kazutoshi Kojima, Tetsuo Takahashi, Yuuki Ishida, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai
Keywords Low Off-Angled Substrate, Pre-Growth Etching, Surface Morphology
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