Paper Title:
How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates
| Periodical |
Materials Science Forum (Volumes 353 - 356)
|
| Main Theme |
Silicon Carbide and Related Materials 2000
|
| Edited by |
G. Pensl, D. Stephani and M. Hundhausen |
| Pages |
155-158 |
| DOI |
10.4028/www.scientific.net/MSF.353-356.155 |
| Citation |
Thierry Chassagne et al., 2001, Materials Science Forum, 353-356, 155 |
| Authors |
Thierry Chassagne, Gabriel Ferro, C. Gourbeyre, M. Le Berre, Daniel Barbier, Yves Monteil |
| Keywords |
Chemical Vapor Deposition (CVD), Hetero-Epitaxy, Stress |
| Price |
US$ 28,- |