Paper Title:
The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process
  Abstract

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Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
167-170
DOI
10.4028/www.scientific.net/MSF.353-356.167
Citation
C.-H. Wu, J. Chung, M. H. Hong, C. A. Zorman, P. Pirouz, M. Mehregany, "The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process", Materials Science Forum, Vols. 353-356, pp. 167-170, 2001
Online since
January 2001
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