Paper Title:
Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
175-178
DOI
10.4028/www.scientific.net/MSF.353-356.175
Citation
M. Eickhoff, S. Zappe, A. Nielsen, G. Krötz, E. Obermeier, N. Vouroutzis, J. Stoemenos, "Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates", Materials Science Forum, Vols. 353-356, pp. 175-178, 2001
Online since
January 2001
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Price
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