Paper Title:
Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
191-194
DOI
10.4028/www.scientific.net/MSF.353-356.191
Citation
Y.M. Lei, Y.H. Yu, L.L. Cheng, L. Lin, B. Sundaraval, E.Z. Luo, S. Lin, C.X. Ren, W.Y. Cheung, S.P. Wong, J.B. Xu, S.C. Zou, I.H. Wilson, "Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering", Materials Science Forum, Vols. 353-356, pp. 191-194, 2001
Online since
January 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.