Paper Title:
Comparison of HF and Ozone Treated SiC Surfaces
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
219-222
DOI
10.4028/www.scientific.net/MSF.353-356.219
Citation
R.P. Mikalo, P. Hoffmann, D.R. Batchelor, A. Lloyd Spetz, I. Lundström, D. Schmeißer, "Comparison of HF and Ozone Treated SiC Surfaces", Materials Science Forum, Vols. 353-356, pp. 219-222, 2001
Online since
January 2001
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Price
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