Paper Title:
High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
291-294
DOI
10.4028/www.scientific.net/MSF.353-356.291
Citation
H. Jacobsson, R. Yakimova, M. Syväjärvi, J. Birch, T.O. Tuomi, E. Janzén, "High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers", Materials Science Forum, Vols. 353-356, pp. 291-294, 2001
Online since
January 2001
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Price
$32.00
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