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Investigation of a PVT SiC-Growth Set-up Modified by an Additional Gas Flow

Journal Materials Science Forum (Volumes 353 - 356)
Volume Silicon Carbide and Related Materials 2000
Edited by G. Pensl, D. Stephani and M. Hundhausen
Pages 33-36
DOI 10.4028/www.scientific.net/MSF.353-356.33
Authors Thomas L. Straubinger, Peter J. Wellmann, Albrecht Winnacker
Keywords Doping, Inclusions, Micropipe Closing, Modified-PVT
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