Investigation of a PVT SiC-Growth Set-up Modified by an Additional Gas Flow |
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| Journal | Materials Science Forum (Volumes 353 - 356) |
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| Volume | Silicon Carbide and Related Materials 2000 |
| Edited by | G. Pensl, D. Stephani and M. Hundhausen |
| Pages | 33-36 |
| DOI | 10.4028/www.scientific.net/MSF.353-356.33 |
| Authors | Thomas L. Straubinger, Peter J. Wellmann, Albrecht Winnacker |
| Keywords | Doping, Inclusions, Micropipe Closing, Modified-PVT |
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