Paper Title:
Implantation Temperature Dependent Deep Level Defects in 4H-SiC
| Periodical | Materials Science Forum (Volumes 353 - 356) |
|---|---|
| Main Theme | Silicon Carbide and Related Materials 2000 |
| Edited by | G. Pensl, D. Stephani and M. Hundhausen |
| Pages | 443-446 |
| DOI | 10.4028/www.scientific.net/MSF.353-356.443 |
| Citation | Boleslaw Formanek et al., 2001, Materials Science Forum, 353-356, 443 |
| Authors | Boleslaw Formanek, L. Storasta, Anders Hallén, Bengt G. Svensson |
| Keywords | Deep Level, DLTS, Implantation, S-Level, Temperature Stable Defects |
| Price | US$ 28,- |
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