Paper Title:
EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
513-516
DOI
10.4028/www.scientific.net/MSF.353-356.513
Citation
H. J. von Bardeleben, J.L. Cantin, "EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC", Materials Science Forum, Vols. 353-356, pp. 513-516, 2001
Online since
January 2001
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Price
$32.00
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