Paper Title:
Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
575-578
DOI
10.4028/www.scientific.net/MSF.353-356.575
Citation
T. Ohshima, H. Itoh, M. Yoshikawa, "Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions", Materials Science Forum, Vols. 353-356, pp. 575-578, 2001
Online since
January 2001
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Price
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