Paper Title:
High Dose Implantation in 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
579-582
DOI
10.4028/www.scientific.net/MSF.353-356.579
Citation
V. Heera, W. Skorupa, J. Stoemenos, B. Pécz, "High Dose Implantation in 6H-SiC", Materials Science Forum, Vols. 353-356, pp. 579-582, 2001
Online since
January 2001
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Price
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