Paper Title:
Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
587-590
DOI
10.4028/www.scientific.net/MSF.353-356.587
Citation
D. Panknin, T. Gebel, W. Skorupa, "Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC", Materials Science Forum, Vols. 353-356, pp. 587-590, 2001
Online since
January 2001
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Price
$32.00
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