Paper Title:
The Monte Carlo Binary Collision Approximation Applied to the Simulation of the Ion Implantation Process in Single Crystal SiC: High Dose Effects
  Abstract

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Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
599-602
DOI
10.4028/www.scientific.net/MSF.353-356.599
Citation
G. Lulli, E. Albertazzi, R. Nipoti, M. Bianconi, A. Carnera, "The Monte Carlo Binary Collision Approximation Applied to the Simulation of the Ion Implantation Process in Single Crystal SiC: High Dose Effects", Materials Science Forum, Vols. 353-356, pp. 599-602, 2001
Online since
January 2001
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