Paper Title:
Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
603-606
DOI
10.4028/www.scientific.net/MSF.353-356.603
Citation
O. Korolkov, T. Rang, "Formation of Large Area Al Contacts on 6H- and 4H-SiC Substrates", Materials Science Forum, Vols. 353-356, pp. 603-606, 2001
Online since
January 2001
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Price
$32.00
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