Paper Title:
Observation of SiO2/SiC Interface with Different Off-Angle from Si(0001) Face Using Transmission Electron Microscopy
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
647-650
DOI
10.4028/www.scientific.net/MSF.353-356.647
Citation
K. Fukuda, S. Suzuki, J. Senzaki, R. Kosugi, T. Tanaka, K. Arai, "Observation of SiO2/SiC Interface with Different Off-Angle from Si(0001) Face Using Transmission Electron Microscopy", Materials Science Forum, Vols. 353-356, pp. 647-650, 2001
Online since
January 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.