Paper Title:
Dependence of Wet Oxidation on the Defect Density in 3C-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 353-356)
Edited by
G. Pensl, D. Stephani and M. Hundhausen
Pages
663-668
DOI
10.4028/www.scientific.net/MSF.353-356.663
Citation
M. Eickhoff, N. Vouroutzis, A. Nielsen, G. Krötz, J. Stoemenos, "Dependence of Wet Oxidation on the Defect Density in 3C-SiC", Materials Science Forum, Vols. 353-356, pp. 663-668, 2001
Online since
January 2001
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Price
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