Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films |
| Journal |
Materials Science Forum (Volumes 363 - 365) |
| Volume |
Positron Annihilation - ICPA-12 |
| Edited by |
Werner Triftshäuser, Gottfried Kögel and Peter Sperr |
| Pages |
15-19 |
| DOI |
10.4028/www.scientific.net/MSF.363-365.15 |
| Citation |
K.P. Rodbell et al., 2001, Materials Science Forum, 363-365, 15 |
| Authors |
K.P. Rodbell, M.P. Petkov, Marc H. Weber, Kelvin G. Lynn, W. Volksen, Robert D. Miller |
| Keywords |
Low Dielectric Constant Films, Porosity, Positron Beams, Positronium (Ps) Lifetime Distribution |
| Full Paper |
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