Paper Title:
Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 363-365)
Edited by
Werner Triftshäuser, Gottfried Kögel and Peter Sperr
Pages
15-19
DOI
10.4028/www.scientific.net/MSF.363-365.15
Citation
K.P. Rodbell, M.P. Petkov, M. H. Weber, K. G. Lynn, W. Volksen, R. D. Miller, "Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films", Materials Science Forum, Vols. 363-365, pp. 15-19, 2001
Online since
April 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.