Current Trends in Ion Implantation |
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| Journal | Materials Science Forum (Volumes 363 - 365) |
|---|---|
| Volume | Positron Annihilation - ICPA-12 |
| Edited by | Werner Triftshäuser, Gottfried Kögel and Peter Sperr |
| Pages | 20-24 |
| DOI | 10.4028/www.scientific.net/MSF.363-365.20 |
| Citation | Russell Gwilliam, 2001, Materials Science Forum, 363-365, 20 |
| Authors | Russell Gwilliam |
| Keywords | Defect, Ion-Implantation, Process Control, Silicon |
| Full Paper | 
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