Defect Studies in Semiconductors |
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| Journal | Materials Science Forum (Volumes 363 - 365) |
|---|---|
| Volume | Positron Annihilation - ICPA-12 |
| Edited by | Werner Triftshäuser, Gottfried Kögel and Peter Sperr |
| Pages | 52-55 |
| DOI | 10.4028/www.scientific.net/MSF.363-365.52 |
| Authors | Masanori Fujinami, Tsuguo Sawada, Takashi Akahane |
| Keywords | Anneal, Coincidence Doppler Broadening, Defect, Ion Implantation, Positron, Silicon, Vacancy, Vacancy Impurity Complexes |
| Full Paper | 
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