Defect Studies in Semiconductors |
| Journal |
Materials Science Forum (Volumes 363 - 365) |
| Volume |
Positron Annihilation - ICPA-12 |
| Edited by |
Werner Triftshäuser, Gottfried Kögel and Peter Sperr |
| Pages |
52-55 |
| DOI |
10.4028/www.scientific.net/MSF.363-365.52 |
| Citation |
Masanori Fujinami et al., 2001, Materials Science Forum, 363-365, 52 |
| Authors |
Masanori Fujinami, Tsuguo Sawada, Takashi Akahane |
| Keywords |
Anneal, Coincidence Doppler Broadening, Defect, Ion-Implantation, Positron, Silicon, Vacancy, Vacancy Impurity Complexes |
| Full Paper |
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