Paper Title:
'Smart Cut' Silicon by Proton Implantation: Lifetime Studies with a Pulsed Positron Beam
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 363-365)
Edited by
Werner Triftshäuser, Gottfried Kögel and Peter Sperr
Pages
532-536
DOI
10.4028/www.scientific.net/MSF.363-365.532
Citation
P. Sperr, G. Kögel, W. Bauer-Kugelmann, W. Triftshäuser, M. Fujinami, "'Smart Cut' Silicon by Proton Implantation: Lifetime Studies with a Pulsed Positron Beam", Materials Science Forum, Vols. 363-365, pp. 532-536, 2001
Online since
April 2001
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