Paper Title:
A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation
  Abstract

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Periodical
Materials Science Forum (Volumes 378-381)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
493-498
DOI
10.4028/www.scientific.net/MSF.378-381.493
Citation
N.I. Fainer, E.A. Maximovski, M.L. Kosinova, M. Rumyantsev, "A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation", Materials Science Forum, Vols. 378-381, pp. 493-498, 2001
Online since
October 2001
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Price
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