Paper Title:
Growth Behaviour of Aluminium Oxide in O2 Microwave Plasma
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 378-381)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
557-562
DOI
10.4028/www.scientific.net/MSF.378-381.557
Citation
A. Quade, H. Wulff, "Growth Behaviour of Aluminium Oxide in O2 Microwave Plasma", Materials Science Forum, Vols. 378-381, pp. 557-562, 2001
Online since
October 2001
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Price
$32.00
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