Impact of Defects on the Technology of Highly Integrated Circuits |
|
| Journal | Materials Science Forum (Volumes 38 - 41) |
|---|---|
| Volume | Defects in Semiconductors 15 |
| Edited by | G. Ferenczi |
| Pages | 1-12 |
| DOI | 10.4028/www.scientific.net/MSF.38-41.1 |
| Citation | Bernd O. Kolbesen et al., 1991, Materials Science Forum, 38-41, 1 |
| Authors | Bernd O. Kolbesen, Werner Bergholz, H. Wendt |
| Full Paper | 
Get the full paper by clicking here
|
First page example
