Paper Title:
Impact of Defects on the Technology of Highly Integrated Circuits
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
1-12
DOI
10.4028/www.scientific.net/MSF.38-41.1
Citation
B. O. Kolbesen, W. Bergholz, H. Wendt, "Impact of Defects on the Technology of Highly Integrated Circuits", Materials Science Forum, Vols. 38-41, pp. 1-12, 1989
Online since
January 1991
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Price
$32.00
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