Paper Title:
Identification of Microdefects Induced in Si after Hydrogen and Helium Plasma Treatments
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
1033-1038
DOI
10.4028/www.scientific.net/MSF.38-41.1033
Citation
M. Singh, J. Weber, T. Zundel, M. Konuma, H. Cerva, "Identification of Microdefects Induced in Si after Hydrogen and Helium Plasma Treatments", Materials Science Forum, Vols. 38-41, pp. 1033-1038, 1989
Online since
January 1991
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