Paper Title:
Defects in MOS Technologies
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
1445-1450
DOI
10.4028/www.scientific.net/MSF.38-41.1445
Citation
D. Korytàr, P. Kavicky, M. Hulman, A. Weissensteiner, L. Tuchscher, "Defects in MOS Technologies", Materials Science Forum, Vols. 38-41, pp. 1445-1450, 1989
Online since
January 1991
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Price
$32.00
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