Paper Title:
Precipitation Phenomena in CMOS Technology
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
189-194
DOI
10.4028/www.scientific.net/MSF.38-41.189
Citation
I. Fàbian, T. Kormàny, K. Erdélyi, E.K. Pal, "Precipitation Phenomena in CMOS Technology", Materials Science Forum, Vols. 38-41, pp. 189-194, 1989
Online since
January 1991
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Price
$32.00
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