Paper Title:
Influence of Defects on the Impurity Diffusion in SIMOX Structures
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
201-206
DOI
10.4028/www.scientific.net/MSF.38-41.201
Citation
D. Tsoukalas, P. Normand, N. Guillemot, "Influence of Defects on the Impurity Diffusion in SIMOX Structures", Materials Science Forum, Vols. 38-41, pp. 201-206, 1989
Online since
January 1991
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.