Paper Title:
Conventional and Rapid Thermal Annealing Induced Defects in Czochralski Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
213-218
DOI
10.4028/www.scientific.net/MSF.38-41.213
Citation
E. Susi, A. Poggi, R. Fabbri, G. Lulli, A.G. Adegboyega, "Conventional and Rapid Thermal Annealing Induced Defects in Czochralski Silicon", Materials Science Forum, Vols. 38-41, pp. 213-218, 1989
Online since
January 1991
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Price
$35.00
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