Paper Title:
Impact of Volume Defects on Gold Gettering in Cz-Si Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
237-242
DOI
10.4028/www.scientific.net/MSF.38-41.237
Citation
F.G. Kirscht, K. Schmalz, I. Babanskaya, "Impact of Volume Defects on Gold Gettering in Cz-Si Wafers", Materials Science Forum, Vols. 38-41, pp. 237-242, 1989
Online since
January 1991
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Price
$32.00
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