Paper Title:
Fluorine-Silicon Reactions and the Etching of Crystalline Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
335-340
DOI
10.4028/www.scientific.net/MSF.38-41.335
Citation
C. G. Van de Walle, F.R. McFeely, S. T. Pantelides, "Fluorine-Silicon Reactions and the Etching of Crystalline Silicon", Materials Science Forum, Vols. 38-41, pp. 335-340, 1989
Online since
January 1991
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Price
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