Paper Title:

Fluorine-Silicon Reactions and the Etching of Crystalline Silicon

Periodical Materials Science Forum (Volumes 38 - 41)
Main Theme Defects in Semiconductors 15
Edited by G. Ferenczi
Pages 335-340
DOI 10.4028/www.scientific.net/MSF.38-41.335
Citation Chris G. Van de Walle et al., 1991, Materials Science Forum, 38-41, 335
Authors Chris G. Van de Walle, F.R. McFeely, Sokrates T. Pantelides
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