Fluorine-Silicon Reactions and the Etching of Crystalline Silicon
| Periodical | Materials Science Forum (Volumes 38 - 41) |
|---|---|
| Main Theme | Defects in Semiconductors 15 |
| Edited by | G. Ferenczi |
| Pages | 335-340 |
| DOI | 10.4028/www.scientific.net/MSF.38-41.335 |
| Citation | Chris G. Van de Walle et al., 1991, Materials Science Forum, 38-41, 335 |
| Authors | Chris G. Van de Walle, F.R. McFeely, Sokrates T. Pantelides |
| Price | US$ 28,- |