Paper Title:
Thermal Donor Formation and Mechanism of Enhanced Oxygen Diffusion in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 38-41)
Edited by
G. Ferenczi
Pages
589-594
DOI
10.4028/www.scientific.net/MSF.38-41.589
Citation
V.P. Markevich, L.F. Makarenko, L.I. Murin, "Thermal Donor Formation and Mechanism of Enhanced Oxygen Diffusion in Silicon", Materials Science Forum, Vols. 38-41, pp. 589-594, 1989
Online since
January 1991
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Price
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